JPH044400Y2 - - Google Patents

Info

Publication number

JPH044400Y2

JPH044400Y2 JP5697486U JP5697486U JPH044400Y2 JP H044400 Y2 JPH044400 Y2 JP H044400Y2 JP 5697486 U JP5697486 U JP 5697486U JP 5697486 U JP5697486 U JP 5697486U JP H044400 Y2 JPH044400 Y2 JP H044400Y2

Authority

JP

Japan

Prior art keywords

thin film

back electrode

insulating layer

electrode

melting point

Prior art date

1986-04-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000010409 thin film Substances 0.000 claims description 49
• 230000008018 melting Effects 0.000 claims description 22
• 238000002844 melting Methods 0.000 claims description 22
• 239000002184 metal Substances 0.000 claims description 21
• 229910052751 metal Inorganic materials 0.000 claims description 21
• 239000007769 metal material Substances 0.000 claims description 20
• 239000000758 substrate Substances 0.000 claims description 16
• 239000000956 alloy Substances 0.000 claims description 11
• 229910045601 alloy Inorganic materials 0.000 claims description 11
• 230000015556 catabolic process Effects 0.000 description 36
• 239000011521 glass Substances 0.000 description 11
• 239000011159 matrix material Substances 0.000 description 9
• 238000007740 vapor deposition Methods 0.000 description 9
• 230000008020 evaporation Effects 0.000 description 6
• 238000001704 evaporation Methods 0.000 description 6
• 239000006059 cover glass Substances 0.000 description 4
• 239000010408 film Substances 0.000 description 4
• 229910052738 indium Inorganic materials 0.000 description 4
• 229910052749 magnesium Inorganic materials 0.000 description 4
• 239000000463 material Substances 0.000 description 4
• 238000004544 sputter deposition Methods 0.000 description 4
• 229910052725 zinc Inorganic materials 0.000 description 4
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
• 229910052797 bismuth Inorganic materials 0.000 description 3
• 229910052793 cadmium Inorganic materials 0.000 description 3
• 229910052745 lead Inorganic materials 0.000 description 3
• 239000011295 pitch Substances 0.000 description 3
• 229910052714 tellurium Inorganic materials 0.000 description 3
• 229910052716 thallium Inorganic materials 0.000 description 3
• 239000000853 adhesive Substances 0.000 description 2
• 230000001070 adhesive effect Effects 0.000 description 2
• 229910052782 aluminium Inorganic materials 0.000 description 2
• 229910052787 antimony Inorganic materials 0.000 description 2
• 239000012530 fluid Substances 0.000 description 2
• 238000010030 laminating Methods 0.000 description 2
• 230000001681 protective effect Effects 0.000 description 2
• 238000011084 recovery Methods 0.000 description 2
• 229920002545 silicone oil Polymers 0.000 description 2
• 229910052718 tin Inorganic materials 0.000 description 2
• 229910002909 Bi-Te Inorganic materials 0.000 description 1
• 229910020836 Sn-Ag Inorganic materials 0.000 description 1
• 229910020888 Sn-Cu Inorganic materials 0.000 description 1
• 229910020988 Sn—Ag Inorganic materials 0.000 description 1
• 229910019204 Sn—Cu Inorganic materials 0.000 description 1
• 229910001215 Te alloy Inorganic materials 0.000 description 1
• 230000032683 aging Effects 0.000 description 1
• 229910052804 chromium Inorganic materials 0.000 description 1
• 230000006378 damage Effects 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 230000005684 electric field Effects 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 238000007667 floating Methods 0.000 description 1
• 230000004927 fusion Effects 0.000 description 1
• 229910052733 gallium Inorganic materials 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• 229910052759 nickel Inorganic materials 0.000 description 1
• 239000011148 porous material Substances 0.000 description 1
• 229910052709 silver Inorganic materials 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 229910052719 titanium Inorganic materials 0.000 description 1